H. B. Profijt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by H. B. Profijt returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
2Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
3Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
4Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
5Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
6The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides


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