Your search for plasma enhanced atomic layer deposition publications authored by H. B. Profijt returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3|
|2||Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides|
|3||Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD|
|4||Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films|
|5||Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth|
|6||The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides|
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