Search Plasma ALD Publication Database By...

H. B. Profijt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by H. B. Profijt returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
2Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
3Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
4Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
5Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
6The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at:

Follow on Twitter

Follow @PlasmaALDGuy


© 2014-2018