Clement Lansalot-Matras Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Clement Lansalot-Matras returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Ultra-Low Temperature Deposition of Copper Seed Layers by PEALD
2PEALD of Copper using New Precursors for Next Generation of Interconnections
3Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
4Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2
5Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
6Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
7Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition