Clement Lansalot-Matras Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Clement Lansalot-Matras returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2
2Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition
3Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
4Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
5Ultra-Low Temperature Deposition of Copper Seed Layers by PEALD
6PEALD of Copper using New Precursors for Next Generation of Interconnections
7Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor