Seung-Youl Kang Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Seung-Youl Kang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils|
|2||All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process|