Dae-Hong Ko Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Dae-Hong Ko returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition|
|2||Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method|