Sumit Kumar Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sumit Kumar returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|Atomic layer deposition growth of a novel mixed-phase barrier for seedless copper electroplating applications
|Development of Manufacturable Solutions for the Direct Plating of Copper on Robust ALD-Grown Barriers