Duo Cao Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Duo Cao returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures
2	Effects of rapid thermal annealing on the properties of HfO2/La2O3 nanolaminate films deposited by plasma enhanced atomic layer deposition
3	Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
4	Negative differential resistance in the I-V curves of Al2O3/AlGaN/GaN MIS structures
5	Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
6	Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition

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