Duo Cao Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Duo Cao returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effects of rapid thermal annealing on the properties of HfO2/La2O3 nanolaminate films deposited by plasma enhanced atomic layer deposition
2Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures
3Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition
4Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
5Negative differential resistance in the I-V curves of Al2O3/AlGaN/GaN MIS structures
6Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si