Your search for plasma enhanced atomic layer deposition publications authored by Duo Cao returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures|
|2||Effects of rapid thermal annealing on the properties of HfO2/La2O3 nanolaminate films deposited by plasma enhanced atomic layer deposition|
|3||Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si|
|4||Negative differential resistance in the I-V curves of Al2O3/AlGaN/GaN MIS structures|
|5||Properties of HfAlO film deposited by plasma enhanced atomic layer deposition|
|6||Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition|
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