Duo Cao Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Duo Cao returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures
2Effects of rapid thermal annealing on the properties of HfO2/La2O3 nanolaminate films deposited by plasma enhanced atomic layer deposition
3Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
4Negative differential resistance in the I-V curves of Al2O3/AlGaN/GaN MIS structures
5Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
6Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition