Damon B. Farmer Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Damon B. Farmer returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition|
|2||Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources|