Youngdo Won Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Youngdo Won returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1The reaction pathways of the oxygen plasma pulse in the hafnium oxide atomic layer deposition process
2Initial reaction of hafnium oxide deposited by remote plasma atomic layer deposition method
3Effect of Nitrogen Incorporation in HfO2 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
4Characteristics of Al2O3 Thin Films Deposited Using Dimethylaluminum Isopropoxide and Trimethylaluminum Precursors by the Plasma-Enhanced Atomic-Layer Deposition Method