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Sumit Agarwal Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sumit Agarwal returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma
2In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
3Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook
4Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
5Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
6Low temperature hydrogen plasma-assisted atomic layer deposition of copper studied using in situ infrared reflection absorption spectroscopy
7Surface reactions of aminosilane precursors during N2 plasma-assisted atomic layer deposition of SiNx
8Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
9Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
10Influence of Surface Temperature on the Mechanism of Atomic Layer Deposition of Aluminum Oxide Using an Oxygen Plasma and Ozone