Beom-Yong Kim Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Beom-Yong Kim returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition of La2O3 Thin Films by Using an Electron Cyclotron Resonance Plasma Source|
|2||Lanthanum-Oxide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition|