Zonghoon Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Zonghoon Lee returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition
2Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
3In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
4Very high frequency plasma reactant for atomic layer deposition