Robert Peter Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Robert Peter returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition
2Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition


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