P. Engelhart Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by P. Engelhart returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition|
|2||Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon|