Search 1636 plasma ALD publications by:
Search 1636 plasma ALD publications by:
Ivan Martinovic Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Ivan Martinovic returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
---|---|
1 | Direct epitaxial nanometer-thin InN of high structural quality on 4H-SiC by atomic layer deposition |