Ivan Martinovic Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Ivan Martinovic returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Direct epitaxial nanometer-thin InN of high structural quality on 4H-SiC by atomic layer deposition|
|2||Epitaxial GaN using Ga(NMe2)3 and NH3 plasma by atomic layer deposition|