Sonja Sioncke Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sonja Sioncke returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Thermal and Plasma Enhanced Atomic Layer Deposition of Al2O3 on GaAs Substrates|
|2||Interfaces of high-k dielectrics on GaAs: Their common features and the relationship with Fermi level pinning|