Andrew C. Kummel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andrew C. Kummel returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Nitride passivation of the interface between high-k dielectrics and SiGe
2Experimental and theoretical determination of the role of ions in atomic layer annealing
3The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces