Andrew C. Kummel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andrew C. Kummel returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces
2Nitride passivation of the interface between high-k dielectrics and SiGe
3Experimental and theoretical determination of the role of ions in atomic layer annealing