Yong-Hae Kim Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Yong-Hae Kim returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils|
|2||Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs|