Jan Ingo Flege Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jan Ingo Flege returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition|
|2||Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition|