Search 1636 plasma ALD publications by:
Search 1636 plasma ALD publications by:
S. Rushworth Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by S. Rushworth returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma |
2 | Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma |