Your search for plasma enhanced atomic layer deposition publications authored by H. Grampeix returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Spectral analysis of sidewall roughness during resist-core self-aligned double patterning integration|
|2||Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach|
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