Bernd Gruska Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Bernd Gruska returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
2Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
3Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study