Rainer Loesing Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Rainer Loesing returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | Impact of oxygen plasma on nitrided and annealed atomic layer deposited SiO2/high-k/metal gate for high-voltage input and output fin-shaped field effect transistor devices |