François Leverd Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by François Leverd returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Patterning of silicon nitride for CMOS gate spacer technology. III. Investigation of synchronously pulsed CH3F/O2/He plasmas|