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Ideal for:
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Zhongjian Wang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Zhongjian Wang returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
2Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures
3Carbon nanotube-supported Cu3N nanocrystals as a highly active catalyst for oxygen reduction reaction
4Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
5Negative differential resistance in the I-V curves of Al2O3/AlGaN/GaN MIS structures
6Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition