LiAo Cao Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by LiAo Cao returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films|
|2||Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films|