N.K.A.M. Galvão Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by N.K.A.M. Galvão returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode