Tae-Sub Kim Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Tae-Sub Kim returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films|
|2||Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor|