Ki-Hoon Lee Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Ki-Hoon Lee returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||WNx Film Prepared by Atomic Layer Deposition using F-Free BTBMW and NH3 Plasma Radical for ULSI Applications|
|2||Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition|