Your search for plasma enhanced atomic layer deposition publications authored by Zhen Zhu returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Influence of plasma parameters on the properties of ultrathin Al2O3 films prepared by plasma enhanced atomic layer deposition below 100C for moisture barrier applications|
|2||Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide|
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