Eric W. Deguns Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Eric W. Deguns returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Conformal Fe, Co and Ni Films from Oxides and Nitrides Grown by Atomic Layer Deposition
2Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
3Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition