Delphine Longrie Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Delphine Longrie returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
2Texture of atomic layer deposited ruthenium
3A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects