Your search for plasma enhanced atomic layer deposition publications authored by Delphine Longrie returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects|
|2||Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor|
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