Your search for plasma enhanced atomic layer deposition publications authored by Alfredo Mameli returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Anti-stiction coating for mechanically tunable photonic crystal devices|
|2||Area-Selective Atomic Layer Deposition of In2O3:H Using a µ-Plasma Printer for Local Area Activation|
|3||Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle|
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