Seongjae Cho Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Seongjae Cho returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor |