An-Shih Shih Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by An-Shih Shih returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Improving Thermal Stability and Interface State Density of High-k Stacks by Incorporating Hf into an Interfacial Layer on p-Germanium|
|2||Incorporating Yttrium into a GeO Interfacial Layer with HfO2-Based Gate Stack on Ge|