Vladimir Kolkovsky Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Vladimir Kolkovsky returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Interaction of hydrogen with hafnium dioxide grown on silicon dioxide by the atomic layer deposition technique |