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The publication database currently has 1559 entries.
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192 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics
83 Theses

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Recent Database Additions
Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
Search 1559 plasma ALD publications by:
192 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics

Dennis M. Hausmann Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dennis M. Hausmann returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
2Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
3Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma
4Surface reactions of aminosilane precursors during N2 plasma-assisted atomic layer deposition of SiNx
5Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies

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