Sanghyun Ju Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sanghyun Ju returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Direct deposition of aluminum oxide gate dielectric on graphene channel using nitrogen plasma treatment |
| 2 | Plasma-enhanced atomic layer deposition of superconducting niobium nitride |