D Zielke Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by D Zielke returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks
2Improved understanding of recombination at the Si/Al2O3 interface
3Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells