Hidemichi Minowa Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hidemichi Minowa returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Enhanced interfacial reaction of precursor and low temperature substrate in HfO2 atomic layer deposition with highly Ar diluted O2 plasma