Timofey V. Perevalov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Timofey V. Perevalov returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control