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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Jacqueline S. Wrench Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jacqueline S. Wrench returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
2Atomic Layer Deposition of Niobium Nitride from Different Precursors
3A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density