Noémi Leick Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Noémi Leick returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Surface reactions of aminosilane precursors during N2 plasma-assisted atomic layer deposition of SiNx
2Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
3Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry
4In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
5Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum