2021 Year in Review

The publication database currently has 1628 entries.

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272 Precursors and Plasma Gases

251 Film and Plasma Characteristics

90 Theses

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Effect of atomic layer plasma treatment on TALD-ZrO₂ film to improve the corrosion protection of Mg-Ca alloy Deposition and Characterization of RP-ALD SiO₂ Thin Films with Different Oxygen Plasma Powers Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation

Search 1628 plasma ALD publications by:

203 Films Compositions

272 Precursors and Plasma Gases

77 Deposition Hardwares

251 Film and Plasma Characteristics

Noémi Leick Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Noémi Leick returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic layer deposition of Ru from CpRu(CO)₂Et using O₂ gas and O₂ plasma
2	Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
3	In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
4	Plasma-Assisted Atomic Layer Deposition of SrTiO₃: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry
5	Surface reactions of aminosilane precursors during N₂ plasma-assisted atomic layer deposition of SiN_x