Noémi Leick Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Noémi Leick returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
2Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
3In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
4Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry
5Surface reactions of aminosilane precursors during N2 plasma-assisted atomic layer deposition of SiNx