Your search for plasma enhanced atomic layer deposition publications authored by Noémi Leick returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma|
|2||Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum|
|3||In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd|
|4||Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry|
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