Noémi Leick Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Noémi Leick returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
2	Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
3	In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
4	Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry

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