Cary G. Allen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Cary G. Allen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
2Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc