Sung-Sil Cho Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sung-Sil Cho returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma |
| 2 | Study on the resistive switching time of TiO2 thin films |