Pierre Morin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Pierre Morin returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes
2Evaluation of plasma parameters on PEALD deposited TaCN