Pierre Morin Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Pierre Morin returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Evaluation of plasma parameters on PEALD deposited TaCN |
2 | Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes |