Geert Rampelberg Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Geert Rampelberg returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers|
|2||Plasma Enhanced Atomic Layer Deposition on Powders|