Peter S. Barry Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter S. Barry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
2Atomic layer deposition of titanium nitride for quantum circuits
3Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires