Peter S. Barry Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Peter S. Barry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators|
|2||Atomic layer deposition of titanium nitride for quantum circuits|