Alexander Pyymaki Perros Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander Pyymaki Perros returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement
2High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
3Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
4Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
5Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
6Surface passivation of GaAs nanowires by the atomic layer deposition of AlN


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