Alexander Pyymaki Perros Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander Pyymaki Perros returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
2Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
3Protective capping and surface passivation of III-V nanowires by atomic layer deposition
4Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement
5Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
6Surface passivation of GaAs nanowires by the atomic layer deposition of AlN
7High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
8Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas