Alexander Pyymaki Perros Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander Pyymaki Perros returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Surface passivation of GaAs nanowires by the atomic layer deposition of AlN
2Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
3Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
4Protective capping and surface passivation of III-V nanowires by atomic layer deposition
5High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
6Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
7Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement
8Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas