Jan Dellith Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jan Dellith returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||3D structure evolution using metastable atomic layer deposition based on planar silver templates|
|2||Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma|