Nick Singh Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Nick Singh returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor|
|2||Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor|